Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Boris Regaard, Tolga Ergin, Oliver Schlosser | 2024-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Boris Regaard, Tolga Ergin, Oliver Schlosser | 2024-12-17 |