Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Martin Lambert, Boris Regaard, Oliver Schlosser | 2024-12-17 |
| 12007693 | Laser focussing module | Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Andreas Hopf, Derk Jan Wilfred Klunder +7 more | 2024-06-11 |