Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171054 | EUV light source with a beam positioning device | Martin Lambert, Tolga Ergin, Oliver Schlosser | 2024-12-17 |
| 12053840 | Method for determining a parameter of a processing process and processing machine | Winfried Magg | 2024-08-06 |