Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007693 | Laser focussing module | Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Tolga Ergin, Andreas Hopf +7 more | 2024-06-11 |
| 11968767 | EUV light source with a separation device | Oliver Schlosser | 2024-04-23 |