Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2024-12-31 |
| 12087599 | Substrate processing apparatus and apparatus cleaning method | Hidemasa Aratake, Osamu Kuroda | 2024-09-10 |
| 12042815 | Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method | Kotaro Tsurusaki, Koji Yamashita, Yusuke Yamamoto, Koji Tanaka | 2024-07-23 |
| 11978644 | Substrate processing system and substrate processing method | Kotaro Tsurusaki, Keiji Onzuka, Yoshihiro Kai | 2024-05-07 |