Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2024-12-31 |
| 12042815 | Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method | Koji Yamashita, Yusuke Yamamoto, Koji Tanaka, Kouzou Kanagawa | 2024-07-23 |
| 11978644 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Keiji Onzuka, Yoshihiro Kai | 2024-05-07 |