Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Yoshihiro Kai | 2024-12-31 |
| 11978644 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Yoshihiro Kai | 2024-05-07 |