Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183613 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Keiji Onzuka | 2024-12-31 |
| 11978644 | Substrate processing system and substrate processing method | Kouzou Kanagawa, Kotaro Tsurusaki, Keiji Onzuka | 2024-05-07 |
| 11887871 | Substrate processing apparatus and substrate processing method | Kazushige Sano, Yuichi Tanaka | 2024-01-30 |
| 11862486 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2024-01-02 |