Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027394 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuyoshi Shinohara | 2024-07-02 |
| 11862486 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Yoshihiro Kai, Gentaro Goshi, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2024-01-02 |