Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051605 | Substrate processing apparatus | Nobuhiro Ogata, Daisuke Goto, Takahiro Koga, Kanta Mori, Yusuke Hashimoto | 2024-07-30 |
| 12044973 | Substrate processing apparatus and substrate processing method | — | 2024-07-23 |
| 12027394 | Substrate processing method and substrate processing apparatus | Kazuki Kosai, Kazuyoshi Shinohara | 2024-07-02 |
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Kenji Yada, Yusuke Hashimoto +2 more | 2024-06-11 |
| 11955352 | Substrate processing apparatus | Daisuke Goto, Takashi Nakazawa, Yusuke Takamatsu, Yusuke Hashimoto | 2024-04-09 |
| 11862474 | Substrate processing apparatus and substrate processing method | Taisei Inoue, Takashi Nakazawa | 2024-01-02 |