Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148632 | Substrate processing apparatus and cleaning method of mist guard | Yusuke Hashimoto, Daisuke Goto, Jiro Higashijima, Nobuhiro Ogata | 2024-11-19 |
| 12051605 | Substrate processing apparatus | Nobuhiro Ogata, Hiroki Sakurai, Daisuke Goto, Takahiro Koga, Yusuke Hashimoto | 2024-07-30 |
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kenji Yada, Yusuke Hashimoto +2 more | 2024-06-11 |