Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148632 | Substrate processing apparatus and cleaning method of mist guard | Yusuke Hashimoto, Daisuke Goto, Kanta Mori, Nobuhiro Ogata | 2024-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148632 | Substrate processing apparatus and cleaning method of mist guard | Yusuke Hashimoto, Daisuke Goto, Kanta Mori, Nobuhiro Ogata | 2024-11-19 |