Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Yusuke Hashimoto +2 more | 2024-06-11 |
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Satoshi Shimmura, Koji Takayanagi, Shinichi Seki +1 more | 2024-01-09 |