Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11868057 | Solution treatment apparatus and cleaning method | Kenta SHIBASAKI, Hiroichi Inada, Satoshi Shimmura, Kenji Yada, Shinichi Seki +1 more | 2024-01-09 |
| 11862485 | Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus | Satoshi Shimmura, Kohei Kawakami, Hiroichi Inada | 2024-01-02 |