Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12151255 | Coating apparatus and coating method | Hideki Kajiwara, Yuya Yonemitsu, Shinichiro YAMANAKA, Shinichi MIZUSHINO, Naruaki Iida +1 more | 2024-11-26 |
| 11860542 | Liquid treatment apparatus and method of adjusting temperature of treatment liquid | Takashi Yamauchi, Daiki Shibata | 2024-01-02 |
| 11862485 | Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus | Satoshi Shimmura, Hiroichi Inada, Koji Takayanagi | 2024-01-02 |