Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12109580 | Processing liquid nozzle and cleaning apparatus | Daisuke Goto, Katsuhiro Morikawa | 2024-10-08 |
| 12051605 | Substrate processing apparatus | Nobuhiro Ogata, Hiroki Sakurai, Daisuke Goto, Kanta Mori, Yusuke Hashimoto | 2024-07-30 |