Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087599 | Substrate processing apparatus and apparatus cleaning method | Hidemasa Aratake, Kouzou Kanagawa | 2024-09-10 |
| 11869780 | Substrate liquid processing apparatus | Takahiro Kawazu, Takafumi Tsuchiya, Hideaki Sato, Hidemasa Aratake, Takashi Nagai +1 more | 2024-01-09 |