Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12001147 | Precision multi-axis photolithography alignment correction using stressor film | Anthony R. Schepis, Mark I. Gardner, Anton J. deVilliers, H. Jim Fulford | 2024-06-04 |
| 11994807 | In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones | Andrew WELOTH, Michael Murphy, Steven Gueci, David Conklin | 2024-05-28 |
| 11990334 | Method for tuning stress transitions of films on a substrate | Jodi Grzeskowiak, Anton J. deVilliers | 2024-05-21 |
| 11908728 | System for backside deposition of a substrate | Ronald Nasman, Gerrit J. Leusink, Rodney L. Robison, Hoyoung Kang | 2024-02-20 |
| 11883837 | System and method for liquid dispense and coverage control | Mirko Vukovic, Anton J. deVilliers | 2024-01-30 |