Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007689 | Apparatus and method for spin processing | Mirko Vukovic | 2024-06-11 |
| 11994807 | In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones | Andrew WELOTH, Michael Murphy, Daniel Fulford, David Conklin | 2024-05-28 |