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Anton J. deVilliers

TL Tokyo Electron Limited: 10 patents #4 of 870Top 1%
Overall (2024): #10,034 of 561,600Top 2%
10
Patents 2024

Issued Patents 2024

Showing 1–10 of 10 patents

Patent #TitleCo-InventorsDate
12099299 Method of patterning a substrate using a sidewall spacer etch mask Jodi Grzeskowiak, Anthony R. Schepis 2024-09-24
12040271 Power delivery network for CFET with buried power rails Lars Liebmann, Jeffrey Smith, Daniel Chanemougame 2024-07-16
12020990 Method for threshold voltage tuning through selective deposition of high-k metal gate (HKMG) film stacks Jeffrey Smith, Kandabara Tapily, Lars Liebmann, Daniel Chanemougame, Mark I. Gardner +1 more 2024-06-25
12014984 Method of manufacturing a semiconductor apparatus having stacked devices Lars Liebmann, Jeffrey Smith 2024-06-18
12001147 Precision multi-axis photolithography alignment correction using stressor film Daniel Fulford, Anthony R. Schepis, Mark I. Gardner, H. Jim Fulford 2024-06-04
11990334 Method for tuning stress transitions of films on a substrate Daniel Fulford, Jodi Grzeskowiak 2024-05-21
11966171 Method for producing overlay results with absolute reference for semiconductor manufacturing 2024-04-23
11901360 Architecture design and process for manufacturing monolithically integrated 3D CMOS logic and memory Lars Liebmann, Jeffrey Smith, Kandabara Tapily 2024-02-13
11883837 System and method for liquid dispense and coverage control Mirko Vukovic, Daniel Fulford 2024-01-30
11862497 Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking H. Jim Fulford, Anthony R. Schepis 2024-01-02