Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099299 | Method of patterning a substrate using a sidewall spacer etch mask | Anthony R. Schepis, Anton J. deVilliers | 2024-09-24 |
| 11990334 | Method for tuning stress transitions of films on a substrate | Daniel Fulford, Anton J. deVilliers | 2024-05-21 |