Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921434 | Mask cleaning | Shu-Hao Chang, Norman Chen, Kuo-Chang Kau, Ming-Chin Chien, Shang-Chieh Chien +2 more | 2024-03-05 |
| 11914286 | Pellicle assembly and method for advanced lithography | Amo Chen, Yun-Yue Lin, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin | 2024-02-27 |