Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174527 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-12-24 |
| 12117725 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-10-15 |
| 12066755 | Pellicle for an EUV lithography mask and a method of manufacturing thereof | — | 2024-08-20 |
| 12055855 | Extreme ultraviolet lithography method using robust, high transmission pellicle | — | 2024-08-06 |
| 12013632 | Pellicle having vent hole | Chue-San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh +2 more | 2024-06-18 |
| 12007685 | Method for forming structure of pellicle-mask structure with vent structure | — | 2024-06-11 |
| 11923196 | Photomask pellicle and method of forming the same | Chen-Chieh Yu | 2024-03-05 |
| 11914286 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2024-02-27 |
| 11886109 | EUV photo masks and manufacturing method thereof | — | 2024-01-30 |
| 11868041 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2024-01-09 |