Issued Patents 2024
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906897 | Method for extreme ultraviolet lithography mask treatment | Pei-Cheng Hsu, Yih-Chen Su, Chi-Kuang Tsai, Ta-Cheng Lien, Tzu Yi Wang +1 more | 2024-02-20 |
| 11899357 | Lithography mask | Chien-Cheng Chen, Huan-Ling Lee, Ta-Cheng Lien, Chia-Jen Chen | 2024-02-13 |
| 11868041 | Pellicle and method of using the same | Chue-San Yoo, Pei-Cheng Hsu, Yun-Yue Lin | 2024-01-09 |
| 11860532 | Photomask including fiducial mark and method of making a semiconductor device using the photomask | Ping-Hsun Lin, Chih-Cheng Lin, Chia-Jen Chen | 2024-01-02 |