Issued Patents 2024
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183579 | Method for manufacturing semiconductor device | Kun-Yu Lin, Yu-Ling Ko | 2024-12-31 |
| 12165936 | End point control in etching processes | Jui Fu Hsieh, Chia-Chi Yu, Yi-Jen Chen, Chia-Cheng Tai | 2024-12-10 |
| 12165873 | Method of manufacturing a semiconductor device | En-Ping Lin, Yu-Ling Ko, I-Chung W. Wang, Yi-Jen Chen, Sheng-Kai Jou | 2024-12-10 |
| 12165851 | Plasma processing method for manufacturing semiconductor structure | Yu Lun Ke, Yu-Chi Lin, Yi-Tsang Hsieh, Yu-Hsi TANG | 2024-12-10 |
| 12159807 | Method of manufacturing semiconductor devices and semiconductor device | Kun-Yu Lin, Yu-Ling Ko, I-Chen Chen, Yi-Jen Chen | 2024-12-03 |
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Po-Lung HUNG, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng | 2024-11-12 |
| 12125748 | Contact plug | Chih-Hsuan Lin, Xi-Zong Chen | 2024-10-22 |
| 12125707 | Fin field-effect transistor device and method of forming | Yu-Li Lin, Jui Fu Hsieh, Chih Hsuan Cheng, Tzu-Chan Weng | 2024-10-22 |
| 12080582 | Etching apparatus and methods of cleaning thereof | Yu-Chi Lin, Huai-Tei Yang, Lun-Kuang Tan, Wei-Jen Lo | 2024-09-03 |
| 12074074 | Method and system for processing wafer | Po-Ju Chen, Sheng-Jen Cheng, Cha-Hsin Chao | 2024-08-27 |
| 12020948 | Method for improved polysilicon etch dimensional control | Yun He | 2024-06-25 |
| 12015085 | Method of manufacturing a semiconductor device including etching polysilicon | Yan-Ting Shen, Chia-Chi Yu, Yu-Li Lin, Chih Hsuan Cheng, Tzu-Chan Weng | 2024-06-18 |
| 12002855 | Method of manufacturing a semiconductor device and a semiconductor device | Jui Fu Hsieh, Chih-Shan Chen, Yi-Jen Chen, Tzu-Chan Weng | 2024-06-04 |
| 11984478 | Forming source and drain features in semiconductor devices | Shu Wen Wang, Chih-Shan Chen, Jui Fu Hsieh, Dave Lo | 2024-05-14 |
| 11955430 | Method of manufacturing semiconductor device and semiconductor devices | Chih-Hsuan Lin, Hsi Chung Chen, Ji-Ling WU | 2024-04-09 |
| 11935941 | Semiconductor structure and method for manufacturing thereof | Chih-Hsuan Lin, Hsi Chung Chen | 2024-03-19 |
| 11908754 | Method and system for controlling profile of critical dimension | Jun Shimada, Chen-Fon CHANG | 2024-02-20 |