Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165851 | Plasma processing method for manufacturing semiconductor structure | Yu Lun Ke, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Teng Liao | 2024-12-10 |
| 12080582 | Etching apparatus and methods of cleaning thereof | Huai-Tei Yang, Lun-Kuang Tan, Wei-Jen Lo, Chih-Teng Liao | 2024-09-03 |
| 12040219 | Etch profile control of isolation trench | Hsien-Chung Huang, Chiung Wen Hsu, Mei-Ju KUO, Yu-Ting WENG, Ting Wang +1 more | 2024-07-16 |
| 11977367 | Command script editing method, command script editor and graphic user interface | Li Yang, Yu-Shan Hsu | 2024-05-07 |