Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Teng Liao, Chih-Ching Cheng | 2024-11-12 |
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Po-Lung HUNG
Overall (2024): #309,229 of 561,600Top 60%
1
Patents 2024