Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142494 | Small gas flow monitoring of dry etcher by OES signal | Po-Lung HUNG, Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Teng Liao | 2024-11-12 |
| 11993301 | Unlocking device with pause function | — | 2024-05-28 |