Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125687 | System of semiconductor process and control method thereof | Youngdo Kim, Daewon Kang, Sungyeol Kim, Sangki Nam, Myunggeun Song +3 more | 2024-10-22 |
| 12105132 | Electric field measuring apparatus and method of measuring electric field using the same | Jinyeong Yun, Meehyun Lim, Sungjin Kim, Masahiko Yamabe, Sungyeol Kim +1 more | 2024-10-01 |
| 12014905 | Apparatus and method fabricating semiconductor device | Nam-Kyun Kim, Tae Shin, Deokjin Kwon, Donghyeon Na, Seungbo Shim +6 more | 2024-06-18 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Chansoo Kang, Youngdo Kim, Namkyun Kim, Sungyeol Kim, Sangki Nam +2 more | 2024-05-28 |