Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Vasily Pashkovskiy, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more | 2024-09-10 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Sungyong Lim, Youngdo Kim, Namkyun Kim, Sungyeol Kim, Sangki Nam +2 more | 2024-05-28 |
| 11940620 | Method of cleaning collector of EUV light source system | Changsoon Lim, Youngdo Kim, Daewon Kang, Hoonseop KIM, Sangki Nam +3 more | 2024-03-26 |