Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087550 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Vladimir Protopopov, Chansoo Kang, Youngdo Kim, Hoonseop KIM, Sangki Nam +2 more | 2024-09-10 |