Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Dongseok Han, Kwonsang Seo, Kuihyun Yoon | 2024-12-31 |
| 11996275 | Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof | Sungyong Lim, Chansoo Kang, Youngdo Kim, Sungyeol Kim, Sangki Nam +2 more | 2024-05-28 |