Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Namkyun Kim, Kwonsang Seo, Kuihyun Yoon | 2024-12-31 |