Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183555 | Substrate processing apparatus and method of manufacturing semiconductor device using the same | Seunghan Baek, Sangki Nam, Dongseok Han, Namkyun Kim, Kuihyun Yoon | 2024-12-31 |
| 11869751 | Upper electrode and substrate processing apparatus including the same | Byungjo KIM, Sangki Nam, Jungmin Ko, Seungbo Shim, Younghyun JO | 2024-01-09 |