Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869751 | Upper electrode and substrate processing apparatus including the same | Sangki Nam, Jungmin Ko, Kwonsang Seo, Seungbo Shim, Younghyun JO | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869751 | Upper electrode and substrate processing apparatus including the same | Sangki Nam, Jungmin Ko, Kwonsang Seo, Seungbo Shim, Younghyun JO | 2024-01-09 |