Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020903 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Dougyong Sung, Seungbo Shim +3 more | 2024-06-25 |
| 12014905 | Apparatus and method fabricating semiconductor device | Nam-Kyun Kim, Tae Shin, Deokjin Kwon, Seungbo Shim, Sungyong Lim +6 more | 2024-06-18 |