Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170233 | Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method | Sung Yeol Kim, Sunghyup Kim, Hyung-Jung Yong, Hosun Yoo | 2024-12-17 |
| 12105132 | Electric field measuring apparatus and method of measuring electric field using the same | Jinyeong Yun, Sungjin Kim, Masahiko Yamabe, Sungyeol Kim, Sungyong Lim +1 more | 2024-10-01 |