Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170233 | Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method | Meehyun Lim, Sung Yeol Kim, Hyung-Jung Yong, Hosun Yoo | 2024-12-17 |