Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117347 | Metrology target design for tilted device designs | Mark D. Smith, Michael Adel, Eran Amit, Daniel Kandel | 2024-10-15 |
| 12045009 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Wookrae Kim, Gwangsik Park, Changhoon Choi | 2024-07-23 |
| 12038718 | Holographic microscope and manufacturing method of semiconductor device using the same | Seungbeom Park, Sungmin PARK, Jaehyeon Son, Heejun Ahn | 2024-07-16 |
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Changhyeong YOON, Wookrae Kim, Jaehwang Jung, Jinseob Kim | 2024-06-04 |
| 11988495 | Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation | Kwangsoo Kim, Sungyoon Ryu, Daejun Park, Seong Jin YUN, Seungryeol Oh +4 more | 2024-05-21 |
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Wookrae Kim, Jaehwang Jung, Myoungki Ahn | 2024-04-30 |