Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Wookrae Kim, Jaehwang Jung, Jinseob Kim | 2024-06-04 |