Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Changhyeong YOON, Wookrae Kim, Jaehwang Jung | 2024-06-04 |
| 11898912 | Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same | Sungho Jang, Jungchul Lee, Gwangsik Park, Minhwan Seo, Janghwi Lee +3 more | 2024-02-13 |