Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12045009 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Myungjun Lee, Gwangsik Park, Changhoon Choi | 2024-07-23 |
| 12002698 | Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology method | Myungjun Lee, Changhyeong YOON, Jaehwang Jung, Jinseob Kim | 2024-06-04 |
| 11972960 | Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection method | Myungjun Lee, Jaehwang Jung, Myoungki Ahn | 2024-04-30 |