Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Sangjine Park, Seohyun Kim, Sukhoon Kim, Jihoon Jeong, Younghoo Kim | 2024-08-06 |
| 11964357 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Taemin Earmme, Byoungho Kwon | 2024-04-23 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Younghoo Kim, Sangjine Park, Jihoon Jeong | 2024-03-19 |
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Jihwan Park, Seungmin Shin | 2024-01-23 |