Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Kuntack Lee, Seungmin Shin | 2024-01-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Sangjine Park, Kuntack Lee, Seungmin Shin | 2024-01-23 |