Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Seohyun Kim, Sukhoon Kim, Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2024-08-06 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Younghoo Kim, Kuntack Lee, Jihoon Jeong | 2024-03-19 |
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Kuntack Lee, Jihwan Park, Seungmin Shin | 2024-01-23 |