Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Sangjine Park, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Kuntack Lee | 2024-08-06 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Younghoo Kim, Sangjine Park, Kuntack Lee | 2024-03-19 |