Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068140 | Method and system for monitoring substrate processing apparatus | Sejin OH, Eunwoo Lee, Jongwoo Sun | 2024-08-20 |
| 11984297 | Plasma control device and plasma processing system | Sejin OH, Youngdo Kim, Sanghun Kim, Sungyeol Kim, Younghwan Kim +2 more | 2024-05-14 |
| 11964357 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Byoungho Kwon, Kuntack Lee | 2024-04-23 |
| 11955387 | Method of fabricating a semiconductor device | Seongkeun Cho, Eunhee Jeang, Jihun Lee, Gyumin Jeong, Hyunjae Kang | 2024-04-09 |
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Iksu Byun, Jongwoo Sun, Jewoo Han | 2024-03-12 |