Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984304 | Apparatus and method for plasma etching | Jongwoo Sun, Kyohyeok Kim, Taehwa Kim, Haejoong Park | 2024-05-14 |
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Iksu Byun, Taemin Earmme, Jongwoo Sun | 2024-03-12 |