Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080592 | Film stack simplification for high aspect ratio patterning and vertical scaling | Hui-Jung Wu, Bart J. van Schravendijk, Gereng Gunawan, Jay E. Uglow, Nagraj Shankar +11 more | 2024-09-03 |
| 12040193 | Efficient cleaning and etching of high aspect ratio structures | Ji Zhu, Nathan Musselwhite | 2024-07-16 |
| 11967486 | Substrate processing system including dual ion filter for downstream plasma | Andrew Stratton Bravo, Chih-Hsun Hsu, Serge Kosche, Stephen Whitten, Shih-Chung Kon +3 more | 2024-04-23 |