Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080592 | Film stack simplification for high aspect ratio patterning and vertical scaling | Hui-Jung Wu, Bart J. van Schravendijk, Mark Kawaguchi, Gereng Gunawan, Jay E. Uglow +11 more | 2024-09-03 |
| 12040193 | Efficient cleaning and etching of high aspect ratio structures | Ji Zhu, Mark Kawaguchi | 2024-07-16 |